Dear Cesare,

We supply the MEMS industry with etching tools. ICP/RIE-systems,
RIE-systems, manual or automatic operating

systems.

Our etch systems are already being used by universities and R&D departments
for low volumes and prototyping.

An example of a R&D organisation is IMEC in Leuven (Belgium) where we have
several plasma etching systms

operational.


Do you need more information don't hesitate to contact me also you can visit
our webpage http://www.aim4dse.com


Regards,

Marco


__________________________________________________
Ing. Marco Sengers
Process Engineer Plasma Etching

Dedicated Systems Europe
Microweg 33
6545 CL Nijmegen, The Netherlands

Tel:    +31-(24) 379 0818
Fax:    +31-(24) 373 3626
mail to:        
webpage:        






-----Original Message-----
From: mems-talk-bounces+msengers=aim4dse.com@memsnet.org
[mailto:mems-talk-bounces+msengers=aim4dse.com@memsnet.org]On Behalf Of
Cesare
Sent: Thursday, January 16, 2003 1:28 PM
To: General MEMS discussion
Cc: Bernard.Courtois@imag.fr
Subject: [mems-talk] begin in mems.


I'm from Brasil working as a researcher in a university interested in build
a infra-structure for MEMS and CI design and prototyping and manufacture in
very low volume. Actually, Brasil doesn't have this infra-structure.
It isn´t our intent manufacture CI (- memory, microprocessor....) or MEMS
(airbag sensor, MEMS for inkjet,...). It is our intent focus on specialized
market, like biotech for example.
We are initially planning to build a infra-estructure with 500m2 of
cleanroom classes 10 and 100.
I´m looking for information about equipments to constitute this kind of
infra-structure, for this moment just a idea, (I understand that this is a
difficulty task):
What are these essential equipments?, and costs of this equipments
(approximate)?
Can I use, depending of the mems, the same equipment for mems and CI
prototyping?
Further....
Beyond the cleanroom....what kind of laboratories (and equipment related)
is necessary ?
I was wondering if you could help me?
Thank you very very much
Cesare Quinteiro Pica, MSc
Universidade Federal de Santa Catarina
Florianópolis, Santa Catarina, Brasil


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