Dear all,

does anyone know how a deposited film (oxid or metall) influences the
Q-Factor / damping of torsional resonators. Gas damping is investigated in
different publications. I did not find much to friction within composite
beams or a plastic portion within the torsion.
Any idea or reference is highly appreciated.

Best Regards in Advance

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Dipl.-Ing. Torsten Kießling
Fraunhofer Institute
Photonic Microsystems
Grenzstr. 28
D-01109 Dresden

Tel.: +49(0)351/8823-283
Fax:                -266
email: torsten.kiesling@ipms.fhg.de
Internet: http://www.ipms.fhg.de/
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