Dear Colleagues,

I am trying to locate a supplier for CVD or LPCVD films of TiN.  I am also
interested in BN, as well as any metals.   My particular problem is that I wish
to deposit these films on the sidewalls of holes micromachined completely
through 4" silicon wafers, thus some sort of batch (or furnace) system would
probably be necessary rather than the newer single wafer reactor systems.  Does
anyone even make 4" single wafer reactors?

At this stage I would prefer a vendor (or a university) to do the coating for
me on my prototype parts, but I would also be interested in any leads on
equipment manufacturers.  Any information would be appreciated.  Thank you.

--
Marc Straub
Automotive Components Division, Ford Motor Company
Dearborn, MI  USA

mstraub1@ford.com