Dear all,

I'm considering fabrication of a turn-over pyramid
microstructure (or pit) by surface micromachining.
It's well known that this kind of structure can be
made by anisotropic etching of crystalline Silicon by
bulk micromachining, but I have not heard about this
structure by other materials and micromachining
technology. Anybody can give me suggestions? Thanks.

Best regards,
Ebin

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