--On Thursday, January 23, 2003 7:13 AM -0800 Bill Moffat
 wrote:

>      We have used an epoxy glue loaded with Aluminum for thermally
> conductive glues.  It is commercially available, if you need the
> manufacturer I can find it.  I do not now how to make it release.

I do not know about Al epoxy, but when I've needed to remove silver expoxy
from a chip, I've found that an HNO3-based silver etch took care of it
fairly well without damaging my structures. Of course, you'd have to use an
etch that didn't attack (or attacked at a much lower rate) whatever else is
on your wafer.

Alik Widge
MEMS Laboratory
Carnegie Mellon University