You can send your ideal to Oxford Instrments ,they have the experinence
----- Original Message -----
From: "Stefan Junge" 
To: 
Sent: Wednesday, January 15, 2003 11:01 PM
Subject: [mems-talk] Dry strukturing of tungsten with PR as mask


> Dear all,
>
> i want to structure tungsten dry with PR as masking layer.
> Does anybody have experiences on etchrates, selectivities
> to SiO2. I thought about CH4, SF6 or Ar as gases.
>
> Regards,
>
> Stefan Junge
>
>
> --
> Institute for Microsensors, -actuators and -systems (IMSAS)
> University of Bremen
> Stefan Junge (Ph.D student)
> Dep. 1: Physics/Electrical Engineering
> Otto-Hahn-Allee
> 28359 Bremen, Germany
>
> P.O. Box 330 440
> 28334 Bremen, Germany
>
> Tel.: +49-421-218-3586
> Fax.: +49-421-218-4774
> E-Mail: sjunge@imsas.uni-bremen.de
> Internet: www.imsas.uni-bremen.de
>
>