Charles, I have worked with glass samples I received from Schott. I was intrigued with two of the glasses aspects; 1) photo-patternability and 2) anodic bondability. I saw FOTURAN as a possible rapid prototyping material with specific micro-fluidic applications. The depth was easy to achieve with but the bottoms and sidewalls were rough. When I tried to anodic bond the patterned glass to silicon the glass cracked rather violently, I believe due to TCE mismatch. TCE(FOTURAN) = 8.6 ppm and TCE(Silicon) = 2.6ppm. I did not use any tricks just what I leaned in the document "Fotosensitive structuring of FOTURAN" that I received from Craig Wurzel. Hope this helps, Loren. -----Original Message----- From: Charles Ellis [mailto:cellis@Eng.Auburn.EDU] Sent: Tuesday, January 28, 2003 2:49 PM To: 'General MEMS discussion' Subject: RE: [mems-talk] Photo-definable glass Loren, Have you actually worked with this glass. I have found it to be almost impossible to work with, and expensive. If someone has a lot of experience with this glass please let me know, I would like to learn the "tricks". Thanks, Charles Ellis Auburn University -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of St.Clair, Loren Sent: Tuesday, January 28, 2003 7:47 AM To: 'General MEMS discussion'; 'sarah.schwab@clarisay.com' Subject: RE: [mems-talk] Photo-definable glass Sarah, Foturan from Schott Corporation is a material that can be patterned using a standard mask aligner (300-320nm) and HF. Craig Wurzel can be contacted at wurzel@schottglass.com if you have any questions about prices. Hope this helps, Loren St. Clair -----Original Message----- From: Sarah Schwab [mailto:sarah.schwab@clarisay.com] Sent: Friday, January 24, 2003 4:38 PM To: 'mems-talk@memsnet.org' Subject: [mems-talk] Photo-definable glass Hello there I am looking for some information on photo-definable glass. Could anyone please help me with the following: Suppliers? Approx cost per wafer 4" diameter - sample quantities? Minimum thickness? Many thanks Sarah _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/