> -----Original Message-----
> From: Prem Pal [mailto:prem_iitd@rediffmail.com]
> Sent: Monday, February 03, 2003 3:48 AM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] nickel as a mask in EDP
>
>
> Dear all
> Can electroless or electroplated Nickel be used as a mask for
> anisotropic etching in EDP.any type of suggetion would be highly
> appreciated.
> thanx

In our tests, evaporated nickel (with a chromium adhesion layer)
was not etched at all in KOH. EDP tends to be a little less aggressive
and probably will not etch the nickel, either.

        --Kirt Williams Agilent Technologies