Sofiane, My company has built numerous anti stiction units. the secret is to get the parts totally dry then without exposing them to any air apply the anti stiction coating. Usually any of the silanes will produce a Hydrophobic layer. Another approach is to use one of the octodeconal chemicals. These usually are solids that melt below 100 degrees C and if the atmosphere is low enough in pressure will sublime and redeposit on your units. Not sure where you are geographically but I can possibly run samples for you. let me know what I can do to help. Bill Moffat -----Original Message----- From: sou zou [mailto:soulou2000@yahoo.fr] Sent: Tuesday, February 18, 2003 8:29 AM To: mems-talk@memsnet.org Subject: [mems-talk] tackling MEMS stiction & damp ? Hi folks, The stiction for MEMS due to damp is not a new behaviour. In fact, we are getting in trouble to move our devices (MUMP's components, but Before we didn't get this problem). So, we are expecting a high level of damp in the experiment area in use. My concern is how to tackle this prb immediately (e.g by using a special spray or stuff like that ?). Many thanks, Sofiane --------------------------------- Do You Yahoo!? -- Une adresse @yahoo.fr gratuite et en français ! Testez le nouveau Yahoo! Mail _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/