Dear MEMS Specialists,

I really appreciate if you could help me find data on residual stresses
left in Silicon Nitride layers on usual and hi-quality wafers. For our
research, we would need to find very-low-stress nitride-layered wafers or
methods to create them by our own. Prices, availability and literature are
welcome.

Thanks!
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Maximiliano Fischer
Eng MSc Aero & Astro
CNEA - UNSAM MEMS Group