durusmail: mems-talk: Mechanical properties
Mechanical properties
1997-07-07
Mechanical properties
Dick Chang
1997-07-07
                                                                    9:33 AM
  OFFICE MEMO                                                 Time:
                      Subject:
                      Mechanical properties                         7/7/97
                                                              Date:


Hi!
        I need the values of mechanical properties data for Si3N4 (modulus and
Poisson's ratio) at room temperature. Can someone help? Either the values,
reference to a book or a journal are all helpful.
        Thank you very much.

Dick Chang


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