durusmail: mems-talk: Re: Mechanical properties
Re: Mechanical properties
1997-07-07
Re: Mechanical properties
Tahir Cagin
1997-07-07
Dick Chang wrote:
>
>                                                                     9:33 AM
>   OFFICE MEMO                                                 Time:
>                       Subject:
>                       Mechanical properties                         7/7/97
>                                                               Date:
>
> Hi!
>         I need the values of mechanical properties data for Si3N4 (modulus and
> Poisson's ratio) at room temperature. Can someone help? Either the values,
> reference to a book or a journal are all helpful.
>         Thank you very much.
>
> Dick Chang
>
>

There is a paper in J. Chem Phys. by Goddard and Wendel studying
thermodynamic and mechanical properties of Si3N4.  To my recollection
it had experimental and theoretical values for mechanical
properties.

Full Reference:
J.A. wendel and W.A. Goddard, III.
JOURNAL OF CHEMICAL PHYSICS, Vol. 97, pp5048-5062 (1992)


--
 Dr. Tahir Cagin     | http://www.wag.caltech.edu/home-pages/tahir/
 Materials and Process Simulation Center |   Phone : (818) 395-2728
 California Institute of Technology      |   FAX   : (818) 585-0918
 Pasadena, CA 91125, U.S.A.        |  e-mail: tahir@wag.caltech.edu


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