ITO and it's etch by-products are relatively high vapor pressure materials..
you may want to check with the person responsible for the tool about
cross-contamination issues before even trying to find etch process..
Mike



> -----Original Message-----
> From: Richard_Barnett@stsystems.co.uk
> [SMTP:Richard_Barnett@stsystems.co.uk]
> Sent: Wednesday, February 26, 2003 10:35
> To:   mems-talk@memsnet.org
> Subject:      [mems-talk] dry etch indium oxides and tin oxides
>
>
> Andre
>
> What system do you have to etch these materials?  Without that info it
> will
> be difficult to advise you.
>
> Richard
>
>
> Richard Barnett BEng(Hons) MIEE
> Product Marketing Engineer (MEMS)
>
>
>
>
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