Hi Jason,

   1 to 1 mixtures of 0.5M EDTA and H2O2(30%) are used to strip titanium
nitride.  Have not heard too much about a chromium nitride etch.

Phil






>From: "Wright, Jason" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] Chromium Wet Etching
>Date: Tue, 25 Feb 2003 13:35:59 -0500
>
>Hi,
>
>Would anyone know how wet etch chromium nitride or titanium nitride?
>
>Thanks
>
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