durusmail: mems-talk: how to fabricate the cantilevers on a wafer?
how to fabricate the cantilevers on a wafer?
2003-03-03
2003-03-04
2003-03-04
how to fabricate the cantilevers on a wafer?
Pavel Neuzil
2003-03-04
Hi Ramzee,
The fabrication strongly depends on material of your
interdigitated structures. Perhaps you might elaborate
on that a little bit. Different conductive materials
of your top layer require different sacrificial
layers.
Regards
Pavel

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