Dear Weider Tang,

The helium gas sensor can be created based on the thermal conductometric gas
sensor.
However, if the gas medium with helium contains the gases with high thermal
conductivity
(hydrogen, heavy hydrogen, neon, methane), this sensor can not be used.

With best personal regards
Dr. A.G.Kozlov
Institute of Sensor Microelectronics, Omsk, Russia

----- Original Message -----
From: 唐偉德 
To: 
Sent: Thursday, February 24, 2005 11:02 AM
Subject: [mems-talk] Helium gas sensor ...?


> Dear all,
>
> Does anyone know the working principle of helium gas sensor ?
> Or inform me the related paper about this sensor.
> Thank you a lot.
>
> Weider Tang
> National Tsing Hua Univ. Taiwan
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