>
>Hello,
>        I am starting my research career in the field of MEMS. I want to use
>the Finite Element technique to model microelectromechanical sensor. Can
>anybody give me some related information about that.
>
>Thank you very much for your time.
>
>Sanjeev Saitia
>
>

Sanjeev:

Look at the Jan-Mar 1997 issue of IEEE Computational Science and
Engineering magazine and you will find many references to
finite-element and other techniques that are currently being
used/developed for computational analysis of MEMS

Cheers,
N. Aluru