Alex,


The following publication  may help  you to give a lead to  search more :

"A Study of Undercutting Characteristics in the TMAH - IPA System"

A Merlos. M C Acero, M H Bao. J Bausells and J Eteve

J. Micromech. Microeng, 2(1992) 181 - 183



Ami Chand
Physics Department,
University of California,
Santa Barbara CA 93106, USA
Tel : 805 - 893 - 3999  Fax : 805 - 893 -8315



On Mon, 14 Jul 1997, Alex Jovel wrote:

> Hi, I'm looking for information on silicon etching using TMAH.  Does anybody
know where I could find such info.  Thanks.
>
>
> ---
> Alex Jovel
> jovel@tanner.com
>
>
>