durusmail: mems-talk: Etching solutions
Etching solutions
1997-07-23
Etching solutions
Michael Jackson
1997-07-23
To whomever it concerns,

I am just getting into processing and wanted to obtain information on some
things.  First I need to know what will etch Titanium, besides KOH?  What
will etch gold?  Lastly, what metal can I pattern onto GaN, that will resist
hot KOH? Thank you for your assistance

Michael
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