durusmail: mems-talk: Piezoresistors
Etching of SiN
Piezoresistors
2003-03-13
2003-03-17
2003-03-18
reference material
2003-03-13
2003-03-13
Piezoresistors
krishna
2003-03-18
Dear Mahdi,
I am expecting the resistance values to be around 6.5KOhms.
But all i could find that the resistance value was ranging from 4K Ohms to 10K
Ohms over the adjacent resistors and those resistors are about 5 microns
distance apart.
Thanks
Kris


 mahdi bagheri  wrote:
dear kris,

would ypu tell me what is it's range?



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