durusmail: mems-talk: Re: Etching solutions
Re: Etching solutions
Re: Etching solutions
jonathan d trumbull
1997-07-23
Michael,

To etch Ti you could use:

 Buffered HF (49%), Hydrogen Peroxide (30%), DI water in the ratios of 1:1:20

For gold, a popular recipe is:

 Potassium Iodide, Iodine, DI water in ratios (of mass) 4:1:30

--Jonathan


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