Ed,
You might want to look over the CaMEL files available for MEMSCAP's
PolyMUMPs process, and see if any of them suit your needs.

http://www.memsrus.com/svcscml.html


-buzz

Busbee Hardy
MEMSCAP

T-919-314-2235
M-919-641-3084
F-919-314-2204
buzz.hardy@memscap.com

www.memsrus.com
www.memscap.com

"The Power of a Small World"

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>  -----Original Message-----
> From:         mems-talk-bounces@memsnet.org@JDSUNIPHASE   On Behalf Of
> "Edward Principe" 
> Sent: Tuesday, March 18, 2003 9:20 PM
> To:   mems-talk@memsnet.org
> Subject:      [mems-talk] Open MEMS modules
>
> Excuse my ignorance, I am just beginning research into the use of FIB and
> other fabrication techniques to build MEMS structures.  My expertise is
> electron microscopy and spectroscopy (Auger, XPS, TEM/STEM) and use of FIB
> for defect analysis & TEM preparation.  I am interested in designing a
> MEMS structure on a modified TEM grid to manipulate a TEM sample.
>
> Is there such a thing as a database of publicly available electronic files
> (i.e., CAD and/or STL files) for designs of MEMS modules such as
> micro-actuators, manipulators, etc.  I have seen several versions of
> interdigitated type X,Y, Z translation and torsional capacitor plate type
> motion structures and micro-tweezers, etc.  For directly milled and
> deposited structures, I assume these devices are based upon design
> drawings that are programmed analogous to CNC.  At least this can be done
> in principal with a FIB using script type language for control,
> reliability depending upon complexity.
>
> It seems that if electronic files of MEMS designs were available
> researchers and designers could move more quickly to test & modify
> structures using "standard" components as a basis.  I suppose the designs
> could even be licensed or used with approval of the designer.
>
> Thanks.
>
> Regards,
> Ed
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