What's your requirements on side wall angle? We at Digital Optics
Corporation may be able to do the job.

Yinbao Yang
Digital Optics Corporation
9815 David Taylor Drive
Charlotte, NC 28262


-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Alex Pozdin
Sent: Wednesday, June 26, 2002 11:53 AM
To: MEMC chat
Subject: [mems-talk] etching cavities in borosilicate glass


Hello,
we are looking for the way to etch two concentric square cavities in
borosilicate glass slides 25x 75x 0.5 mm. Close to the surface is a
cavity
22x22mm 110+/-10um deep and second cavity is 16X16 mm and 67+/- 20 um
deep.
Minimal roughness on the bottom of second cavity is required for visible
light
detection. It could be done out of 3 pieces of glass, but this way is
expensive. Please, advice
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
e-mail: apozdin@laserusa.com
fax 573-486-5540
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