Dear Ramji,
You can try patterning  the wafer rotated in 45 degree.

Mike Lin
Chu-Nan,Taiwan

----- Original Message -----
From: ramji dhakal 
To: General MEMS discussion 
Sent: Wednesday, March 26, 2003 5:46 AM
Subject: [mems-talk] etching for vertical walls


> hi mems workers,
>
> can we, by any means control the side wall angle in
> etching the Si wafer with anisotropic KOH other than
> that permitted by the (111) etch stop layers?
>
> Also, can abyone let me know how we can get the
> vertical walls by etching away with KOH?
>
> Thanks and regards.
>
> Ramji Dhakal
> Binghamton, NY
>
> =====
> _________________________________________________________________Ramji
Dhakal
>
> M S Mechanical Engineering,
> SUNY Binghamton, NY
>
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