Dear listers,

Could you tell me if there is any wet etchant for TiW that would not etch gold
nor aluminium or alumina?We are thinking of using H2O2 and water but we do not
have the possibility to make thick gold layer which makes it very difficult to
determine slectivities.

Thank you in advance


Virginia Soares
INESC-Microsystems and Microtecnologies
Rua Alves Redol,9
1000-029 LISBOA
PORTUGAL
URL:www.inesc-mn.pt