durusmail: mems-talk: Attachment of wafers
Attachment of wafers
2003-04-10
2003-04-14
Attachment of wafers
Imran Ghauri
2003-04-10
Hi guys,
As MEMS-talk member I would like to ask few questions.
I hope you guys will help me.

1) Is there any way I can attach one Si-wafer on top
of other OR
one Si-wafer on top of glass wafer.

2)I need some help in fabrication of MEMS thermopiles,
if anyone of you has done it or know about it plz let
me know so that I can get more info about the same.

3) How can I create front and back etched vacuum
cavities in wafers.


Thanks in Advance

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