durusmail: mems-talk: adhesion problems
Glass RIE
2003-04-08
adhesion problems
2003-04-10
2003-04-11
2003-04-11
adhesion problems
Hongjun Zeng
2003-04-11
To promote adhesion between noble metal and glass substrate, we often
deposit 100-200A chrome as adhesion layer.

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Hongjun Zeng, PhD
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
Tel.: 312-413-5889, Fax: 312-996-6465
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-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Rajib Ahmed
Sent: Thursday, April 10, 2003 9:43 AM
To: General MEMS discussion
Subject: [mems-talk] adhesion problems


Hello everyone,

I am trying to coat some glass substrates with silver but the problem is
poor adhesion.  My coating thickness is approximately 200 nm.  Is there
any way I can pre-treat my glass surface with an adhesion promoter to
improve the quality so that silver can stick better?  Any suggestions
would be greatly appreciated.  Thanks a bunch,

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Rajib Ahmed
347 Hopeman Engineering Building
Department of Electrical and Computer Engineering
University of Rochester
Rochester, NY 14627-0167
Email:rajib@ece.rochester.edu
Phone#:(585)275-8093
Fax#:(585)273-4919
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