durusmail: mems-talk: wet-etching of polyimide
wet-etching of polyimide
2003-04-14
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wet-etching of polyimide
Shadyar Farhangfar
2003-04-12
Dear All,

Does anybody happen to know about the wet-etching of
polyimide? Is there any "standard" etchant to wet-etch
polyimide layers?

Appreciating any hint,
Sh.Farhangfar

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