Kishang, Your windows are likely bukling due to improper film stress for your
application.  Your film must be tensile with the correct film stress
specification.  This can be dialed in during the recipe development for the
Nitride deposition processing.  We do this type of work in my Fab. Neal
RicksShipley Co., LLC

kishang  wrote:Has anyone had significant
experience etching nitride windows on silicon using
a KOH etch? I am trying to create very thin (4200 Angstroms) Silicon Nitride
windows, but my yield goes below 50%. My KOH bath is composed of KOH pellets
and water at 80 degrees C. Are there any ways to reduce wrinkles in windows? I
currently dip my wafers in cool DI water for 10 minutes and then dry them in a
120 degree oven with my pits opening upward (i.e. window surface downward).

Any help would be great. Thanks.

-- Kishan Gupta
UC Berkeley


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