durusmail
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mems-talk
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Narsimha Parvatikar (Narsimha)
MEMS Strain guage (Vivek P. Shankam)
Does Cl-containing plasma attack Mo? (Isaac Wing Tak Chan)
Etchants/etch rates for W and NiSi (Kirt Williams)
Piranha etching? (Kirt Williams)
MEMS Strain guage (Kirt Williams)
PECVD NItride/oxide at low temp (anupama@ee.washington.edu)