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mems-talk
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G line positive resist - non TMAH developer (Brehm, Harald)
Need 2u thick PZT etching with minimum undercut (<1u) (Lou Chomas)
needed: durable etch mask for making gratings in quartz (bobhendu@aol.com)
Stresses of SiO2 and Si3N4 (Lou Chomas)
Selective Cu & Cr Etchant (MEMS R FUN)
Ni Electroplating Issues (MEMS R FUN)
Polyimide etch (kris)
How to avoid the breaking of the cantilevers during the backside etching process? (Duan)