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mems-talk
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Pyrex isotropic etching (Yoshi Sakata)
TiO2 thin film mechanical properties deposition dry etching (Jin Yu)
Pyrex isotropic etching (Edward Sebesta)
Silicon Carbide Bonding (Ben Pecholt)
Hf resistant Adhesion layer for Au on Si (Michael Larsson)
Low-temperature ALD for Al2O3 or HfO2 (Maggie Q. Lai)