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mems-talk
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RIE gold etch rate (Hakemi, Ghazal)
RIE gold etch rate (SEBESTA Edward)
RIE gold etch rate (Bob Henderson)
RIE for SiO2 and its effect on Cr underneath (liuxf)
PMMA film (Dazhong Wu)
RIE for SiO2 and its effect on Cr underneath (Bob Henderson)