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mems-talk
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Deposition of MgF2 without substrate heating (jsmilne@ee.uwa.edu.au)
This is known as RIE Lag RE: XeF2 etching of Si (xudehui0108)
Cr etching after HF vapor or BOE treatment. (Taekyung Kim)
Copper stability in TMAH (BastiWicklein@aol.com)
Cr etching after HF vapor or BOE treatment. (Don Friedrich)
Dry etching of Si (Alexandre BOE)
definition of hard bake and hard bake recipes (my2232@columbia.edu)
This is known as RIE Lag RE: XeF2 etching of Si (junjun wu)
Hard baking. Adhesion. RE: definition of hard bake and hard bake recipes (Edward Sebesta)