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mems-talk
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Silicon on fused silica or SOS? (Edward Sebesta)
Introductory MEMS books (Yan Xin)
Introductory MEMS books (Kühl Karl)
Introductory MEMS books (Feng Han Hua)
Introductory MEMS books (Prasanna Srinivasan)
Introductory MEMS books (Gareth Jenkins)