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mems-talk
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Titanium etching (helene viatge)
PDMS on polyimide (ketbra koukou)
KOH+IPA (Maria Matschuk)
Multiple layers HSQ or Fox16 (James Paul Grant)
Is XeF2 gas etching copper? (Will Yu)
L.J. Guerin, “The SU-8 Homepage" (Sheng Zhang)
L.J. Guerin, “The SU-8 Homepage" (Gareth Jenkins)
L.J. Guerin, “The SU-8 Homepage" (Jim Beall)
Is XeF2 gas etching copper? (Kyle Lebouitz)
Titanium etching (leiwangsdu)