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mems-talk
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Isotropic etching SiO2 with PMMA mask (Judith Linacero Blanco)
Ti etching and S1813 resist (Shane GUO)
Ti etching and S1813 resist (Kirt Williams)
Ti etching and S1813 resist (Michael Martin)
Ti etching and S1813 resist (Shane GUO)
Ti etching and S1813 resist (G. Puebla-Hellmann)
make the su-8 surface flat (Shane GUO)