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mems-talk
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<200nm dimension RIE etching (Li. Zhang)
RIE recipe for silicon etching using PMMA mask (Li. Zhang)
Waferbonding (Kuijpers, Peter)
SU8 2mm thickness (hari krishnan)
<200nm dimension RIE etching (Michael Martin)
<200nm dimension RIE etching (Li. Zhang)
High temperature oil for oil bath (Jaroslaw Syzdek)
Gold electroplating vaporizes very fast (nahid vahabi)
High temperature oil for oil bath (Mark West)