durusmail
:
mems-talk
..
MEMS surface stick problem in ANSYS contact analysis (Youmin Wang)
Alignment problem with Multilayer SU-8 fabrication (yutchow2@gapps.cityu.edu.hk)
Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550 (Ryan)
Best recipe to etch sio2 using CHF3 gas with ULVAC NE-550 (Martin,Michael David)