Dear Colleagues, Am searching for practical information / experience on thermal oxidation after DRIE Bosch process. I'm using SOI wafers and i want to oxide the wafers after the DRIE step Does anybody know if this process is possible? Any experiences, information, recipes, etc would be greatly appreciated. Best regards, Benoît GAULIER. ================================================= Benoît GAULIER Ingénieur Filière Microtechnologie THALES AVIONICS NAVIGATION 25, rue Jules Védrines 26027 Valence CEDEX Télécopie: (+33) (0) 4-75-79-86-06 Bureau: (+33) (0) 4-75-79-88-25 =================================================