Look on th CNF website http://www.cnf.cornell.edu/cnfprocesses/cnf_process.htm They have a recipe I've beem using for a parallel plate PECVD tool. Jobert van Eisden SUNY Albany -----Original Message----- From: Dlee Li To: mems-talk@memsnet.org Sent: 6/20/2003 5:17 PM Subject: [mems-talk] PECVD Si3N4 recipe Hi, anyone can give me his workable PECVD Si3N4 recipe? we need to add PECVD Si3N4 to our system. thanks Dlee _________________________________________________________________ MSN 8 helps eliminate e-mail viruses. Get 2 months FREE*. http://join.msn.com/?page=features/virus _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/