We here at SMC have had wafers polished on the back side, in order to allow for through the wafer IR alignnment on a Karl Suss alignment tool. We sent the wafers to: CVD systems & Services Penn Center Plaza Quakertown, PA 18951 Contact Person is: Bob Cambel, 215-536-2104 You will need to specify the starting wafer thickness, the final wafer thickness you want, as well as the level of polishing that you need. The turn time is about 2 to 3 weeks. Regards, Tom Pumo Director of R&D for MEMS Devices Standard Microsystems Corporation (SMC) Wafer Foundry Business Unit (516) 435-6822 tom.pumo@smc.com