Hello,
I am looking for a  material for MEMS Actuators .
I need a high eough resitivity material for Joul Heating purpose and a resonable
yiled strenth ( > 500 Mpa) .
It's Young's modules *Coefficient of Thermal Expansion must be great than
polysilicon's. ( > 170Gpa*2.9e-6).
Last of all, the dopositing temperature has to be lower than 600 degree and the
thinnest layer need to be deposited would be 500nm.
Are there any thin film materials like this???

Thanks in Advance!!

Regards,
Kevin YU