Hi Myung Kwon, in case you use positive photoresist, I would suggest you to try XeF2 instead of Fluorine based plasma and after that acetone should work perfectly. In case you have an access to supercritical CO2 process as I do, it is as another option. In case you are intersted to try the XeF2 out, send us a wafer (wafers) and we can etch Molybdenum for you. It is very simple process. Pavel Neuzil SiMEMS Pte Ltd Singapore neuzils@yahoo.com ___________________________________________________ Dear Folks After Mo pattering by RIE, PR stripping is difficult without oxidation with conventional microwave asher using O2 plasma. As you know, O2 plasma is very active, Kinds of Mo, Al, Cu, etc.metals are oxidized with easy. Dose any one knows other methods not to oxidize metals above mentioned? __________________________________ Do you Yahoo!? SBC Yahoo! DSL - Now only $29.95 per month! http://sbc.yahoo.com