Transene Company manufactures Tungsten Etchant TFW for W etching applications. Please contact me for more information or visit our website, www.transene.com. Christopher Christuk Transene Company, Inc. 10 Electronics Avenue Danvers MA 01923 Tel: 978 777 7860 Fax: 978 739 5640 Email: Christopher@transene.com -----Original Message----- From: cshen@briontech.com [mailto:cshen@briontech.com] Sent: Monday, July 07, 2003 1:32 PM To: mems-talk@memsnet.org Subject: [mems-talk] W anisotropic etch and etch mask I'm looking for a W anisotropic etch machine and recipe. Does anyone know of any company or institute that can do this? The feature is about 100nm diameter apertures, W film is about 120nm thick. Any help will be greatly appreciated. Chongfei