Graphite requires a dry etch process.

Christopher Christuk
Transene Company
10 Electronics Avenue
Danvers MA  01923
Tel:  978 777 7860
Fax:  978 739 5640
Email:  Christopher@transene.com

-----Original Message-----
From: Amol Patil [mailto:amolp@ufl.edu]
Sent: Friday, July 11, 2003 6:58 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Graphite etchant?

Does anyone know of method and liquids for etching graphite ? I did try
the piranha etch at 70 degrees  but I am not getting conclusive results.
Does piranha etch graphite?

Thanks for your help
Amol Patil