durusmail: mems-talk: Ion Beam Etch Rates
Ion Beam Etch Rates
1997-10-10
Ion Beam Etch Rates
Robert Cronkite
1997-10-10
I am looking for ion beam etch rates for several compunds, Kapton,
Kevlar and RTV adhesive.  I have enough references from the physics
regime to calculate the etch rates, but have been unable to determine
the chemical makeup of these compounds.

Anybody have any suggestions?

Thanks,
Robert Cronkite
Hughes Research Labs
racronkite@hrl.com


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