CHF3 with a little, e.g. 20%, O2 will plasma etch silicon nitride with good selectivity to resist. An added bonus is that the etch will virtually stop on Si. Roger Shile ----- Original Message ----- From: "Jun Chen"To: Sent: Tuesday, July 29, 2003 8:25 AM Subject: [mems-talk] Si3N4 Dry etch with good selectivity > Hi, > > Any experte can give some suggestions about how to dry etch > 800-1000 A Si3N4(made by PECVD 330C) with good selectivity > with photo-resist AZ4110 10000 A. We don't want to etch many > resist,because it will kill the performance. We tried SF6 > (Unaxis system), it etched many resistor. Any suggestions > will be appreciated. > > Thanks a lot! > > Jun Chen > Email: jchen@mwtinc.com > Phone: 510-651-6700x102 > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/