Hi, We at Cornell have been using Plasmatherm's deep Si etcher for almost a year now and are very happy with it. Many in our group have switched from Cl2-based vertical etching to use of the deep etcher for our processes. One member of our group, Pete Hartwell, is giving a talk at this month's AVS conference in San Jose, CA detailing our experiences with it. If you want, we can send you copies of the slides. Also, feel free to contact us directly if you have any questions. Our contact info is given on the following page along with some early pictures of stuff we did with the machine: http://kale.ee.cornell.edu/fred/plasmatherm/Plasmatherm.html - John ---------------- John Chong jmc4@cornell.edu ---------------- ---------- Forwarded message ---------- Date: Fri, 10 Oct 1997 09:08:24 +0800 (SST) From: M Y LokeTo: MEMS@ISI.EDU Subject: Silicon deep trench etcher Hello fellow MEMS researchers, We would like to purchase a silicon deep trench etcher for our MEMS research work. We have evaluated a few suppliers namely, Alcatel, STS and Plasma Therm (still waiting to hear from Oxford Plasma out in the UK). It is difficult to conclude which machine is better as there are always trade offs between several factors (undercut, selectivity and etch rates). Anyone out there with any comments or suggestions, especially people who have purchased the deep trench etchers? Thanks in advance. Regards Yan