Dear all, Does anybody know if a low temperature CVD oxide (i.e LPCVD or PECVD) can be deposited on Pyrex substrate?. I would like to know if this CVD oxide can have a good adhesion to pyrex. I found in literature almost people deposited CVD oxide on Si substrate. I am expecting that it can have a good adhesion since pyrex is also an oxide. Could anyone who has experience about this process can confirm to me. Thank you. A.K.Ismail.